A compliant electrostatic micro-actuator (structure in the lower left corner of the photo) is compared to the original direct-drive electrostatic actuator (upper right). The compliant micro- actuator produces four times more output force, generates the same output displacement, and occupies one-fifth of the chip space - making it attractive for optical switching and many other MEMS applications. (Photo courtesy of Sandia National Labs)

The photo to the right shows an ultra-stiff optical switching micro-mirror that can be precisely guided using high-force, short-stroke, electrostatic actuators connected through FlexSys-designed compliant displacement amplifiers to produce precise, high-speed, tilt and roll positioning. FlexSys has the knowledge-base and computational tools to design sophisticated MEMS mechanisms such as this. MEMX, a company that specializes in the SUMMiT 5 level micro-fabrication processes originally developed at Sandia National Labs, can make these micro-designs a reality. (Photo courtesy of MEMX)